非晶态纳米硅粉制备方法综述
王腾辉1,2(
), 陈果1, 杨学林1()
), 陈果1, 杨学林1()
Review of preparations of amorphous nanostructured silicon powder
Tenghui WANG1,2(), Guo CHEN1, Xuelin YANG1()
), Guo CHEN1, Xuelin YANG1()
图2. PECVD制备纳米硅粉装置
Fig. 2. Schematic diagram of PECVD device for preparation of nanostructured silicon powder
