飞行时间二次离子质谱在锂基二次电池中的应用
赵志伟, 杨智, 彭章泉

Application of time-of-flight secondary ion mass spectrometry in lithium-based rechargeable batteries
Zhiwei ZHAO, Zhi YANG, Zhangquan PENG
图1 二次离子质谱(SIMS)分析原理:(a) SIMS一次离子源;(b) 一次离子束在溅射过程中撞击样品表面,产生二次离子;(c) 二次离子通过飞行管或四极杆实现分离[23]
Fig. 1 Principles of secondary ion mass spectrometry (SIMS) analysis: (a) SIMS primary ion beam: positive ions or negative ions; (b) the primary ion beam strikes the sample surface during sputtering and then produces secondary ions; (c) secondary ions are accelerated towards the detector, either through a flight tube (ToF-SIMS) or through magnetic separation using a quadrupole (NanoSIMS)[23]