Energy Storage Science and Technology ›› 2019, Vol. 8 ›› Issue (5): 891-896.doi: 10.12028/j.issn.2095-4239.2019.0048

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Inductive displacement sensors based on the integrated demodulation chip

LIU Yating, ZHANG Kai, XU Yang   

  1. The Department of Engineering Physics, Tsinghua University, Beijing 100084, China
  • Received:2019-04-02 Revised:2019-04-10 Online:2019-09-01 Published:2019-04-26

Abstract: As an important component of the high-speed active magnetic bearing (AMB) system, the non-contact displacement sensor has significant impacts on the overall performance of the system. The traditional inductive displacement sensor signal demodulation circuit which is composed of discrete devices, has a high cost and a large space occupation. In order to develop a low-cost, high-integrated demodulation design of inductive displacement sensor, taking the integrated synchronous demodulation chip as the core, this paper performed tasks including the hardware design and manufacturing, software development and debugging, built the test platform of the inductive displacement sensor and finished evaluation experiments for the integrated synchronous demodulation design. The experimental results showed that the linearity between the synchronous demodulation chip output signal and rotor displacement is less than 2%. It is also shown a sensitivity of 3 V/mm, and a minimum resolution of up to 1 μm, which can meet the displacement detection requirements of general AMB systems.

Key words: AMB, inductive displacement sensor, synchronous demodulation, ADA2200

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