基于集成解调芯片的电感式位移传感器

doi:10.12028/j.issn.2095-4239.2019.0048

储能科学与技术 ›› 2019, Vol. 8 ›› Issue (5): 891-896.doi: 10.12028/j.issn.2095-4239.2019.0048

基于集成解调芯片的电感式位移传感器

刘亚婷, 张剀, 徐旸

清华大学工程物理系, 北京 100084

收稿日期:2019-04-02 修回日期:2019-04-10 出版日期:2019-09-01 发布日期:2019-04-26
通讯作者: 张剀,副研究员,主要研究方向为电磁轴承、高速旋转机械,E-mail:zhangkai@mail.tsinghua.edu.cn。
作者简介:刘亚婷(1996-),女,硕士研究生,主要研究方向为电磁轴承,E-mail:liuyatin18@mails.tsinghua.edu.cn
基金资助:
国家重点研发计划（2018YFB0905500），国家自然科学基金（51775292）。

Inductive displacement sensors based on the integrated demodulation chip

LIU Yating, ZHANG Kai, XU Yang

The Department of Engineering Physics, Tsinghua University, Beijing 100084, China

Received:2019-04-02 Revised:2019-04-10 Online:2019-09-01 Published:2019-04-26

摘要/Abstract

摘要： 非接触式的位移传感器作为磁轴承系统的重要组件，对系统的综合性能有着重要的影响。为寻找低成本、高集成度的电感式位移传感器解调方案，本文以集成同步解调芯片为核心，经硬件设计与制板，软件开发与调试，建立了电感式位移传感器的测试平台，完成了对集成同步解调方案的评估实验。实验结果表明，同步解调芯片的输出信号与转子位移的线性度不超过2%，灵敏度为3 V/mm，最小分辨率可达1 μm，能够满足一般磁悬浮轴承系统的位移检测需求。

关键词: 主动磁轴承, 电感式位移传感器, 同步解调, ADA2200

Abstract: As an important component of the high-speed active magnetic bearing (AMB) system, the non-contact displacement sensor has significant impacts on the overall performance of the system. The traditional inductive displacement sensor signal demodulation circuit which is composed of discrete devices, has a high cost and a large space occupation. In order to develop a low-cost, high-integrated demodulation design of inductive displacement sensor, taking the integrated synchronous demodulation chip as the core, this paper performed tasks including the hardware design and manufacturing, software development and debugging, built the test platform of the inductive displacement sensor and finished evaluation experiments for the integrated synchronous demodulation design. The experimental results showed that the linearity between the synchronous demodulation chip output signal and rotor displacement is less than 2%. It is also shown a sensitivity of 3 V/mm, and a minimum resolution of up to 1 μm, which can meet the displacement detection requirements of general AMB systems.

Key words: AMB, inductive displacement sensor, synchronous demodulation, ADA2200

中图分类号:

TM912.9

刘亚婷, 张剀, 徐旸. 基于集成解调芯片的电感式位移传感器[J]. 储能科学与技术, 2019, 8(5): 891-896.

LIU Yating, ZHANG Kai, XU Yang. Inductive displacement sensors based on the integrated demodulation chip[J]. Energy Storage Science and Technology, 2019, 8(5): 891-896.

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基于集成解调芯片的电感式位移传感器

Inductive displacement sensors based on the integrated demodulation chip

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