Energy Storage Science and Technology ›› 2016, Vol. 5 ›› Issue (5): 678-701.doi: 10.12028/j.issn.2095-4239.2016.0045
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WU Yongmin, WU Xiaomeng, ZHU Lei, XU Dinghao, TIAN Wensheng, TANG Weiping
Received:
2016-07-10
Revised:
2016-07-29
Online:
2016-09-01
Published:
2016-09-01
WU Yongmin, WU Xiaomeng, ZHU Lei, XU Dinghao, TIAN Wensheng, TANG Weiping. The development of studies in all-solid-state thin film lithium batteries[J]. Energy Storage Science and Technology, 2016, 5(5): 678-701.
[1] PATIL A,PATIL V,SHIN D W,et al. Issue and challenges facing rechargeable thin film lithium batteries[J]. Materials Research Bulletin,2008,43(8):1913-1942. [2] 郑浩,高健,王少飞,等. 锂电池基础科学问题(VI)—离子在固体中 的输运[J]. 储能科学与技术,2013,2(6):620-635. ZHENG H,GAO J,WANG S F,et al. Fundamental scientific aspects of lithium batteries (VI)—Ionic transport in solids[J]. Energy Storage Science and Technology,2013,2(6):620-635. [3] QUARTARONE E,MUSTARELLI P. Electrolytes for solid-state lithium rechargeable batteries:Recent advances and perspectives[J]. Chemical Society Reviews,2011,40(5):2525-2540. [4] OUDENHOVEN J F,BAGGETTO L,NOTTEN P H. All-solid-state lithium-ion microbatteries:A review of various three-dimensional concepts[J]. Advanced Energy Materials,2011,1(1):10-33. [5] ROBERTS M,JOHNS P,OWEN J,et al. 3D lithium ion batteriesiesum rechargeable batterrication[J]. Journal of Materials Chemistry,2011,21(27):9876-9890. [6] ZHOU Y N,XUE M Z,FU Z W. Nanostructured thin film electrodes for lithium storage and all-solid-state thin-film lithium batteries[J]. Journal of Power Sources,2013,234:310-332. [7] 陈牧,颜悦,刘伟明,等. 全固态薄膜锂电池研究进展和产业化展望[J]. 航空材料学报,2014,34(6):1-20. CHEN M,YAN Y,LIU W M,et al. Research advances and industrialization prospects of all-solid-state thin-film lithium battery[J]. Journal of Aeronautical Materials,2014,34(6):1-20. [8] 张舒,王少飞,凌仕刚,等. 锂离子电池基础科学问题(X)—全固态锂离子电池[J]. 储能科学与技术,2014,3(4):376-394. ZHANG S,WANG S F,LIN S G,et al.Fundamental scientific aspects of lithium ion batteries (X)—All-solid-state lithium-ion batteries[J]. Energy Storage Science and Technology,2014,3(4):376-394. [9] KANEHORI K,MATSUMOTO K,MIYAUCHI K,et al. Thin film solid electrolyte and its application to secondary lithium cell[J]. Solid State Ionics,1983,9:1445-1448. [10] ITO Y,SAKUDA A,OHTOMO T,et al. Preparation of Li2S-GeS2 solid electrolyte thin films using pulsed laser deposition[J]. Solid State Ionics,2013,236:1-4. [11] TENG S,TAN J,TIWARI A. Recent developments in garnet based solid state electrolytes for thin film batteries[J]. Current Opinion in Solid State and Materials Science,2014,18(1):29-38. [12] MUÑOZ F,MONTAGNE L,PASCUAL L,et al. Composition and structure dependence of the properties of lithium borophosphate glasses showing boron anomaly[J]. Journal of Non-Crystalline Solids,2009,355(52):2571-2577. [13] WU F,ZHENG Y,LI L,et al. Novel micronano thin film based on Li-B-P-O target incorporating nitrogen as electrolyte:How does local structure influence chemical and electrochemical performances?[J]. The Journal of Physical Chemistry C,2013,117(38):19280-19287. [14] KARAN N,NATESAN B,KATIYAR R. Structural and lithium ion transport studies in borophosphate glasses[J]. Solid State Ionics,2006,177(17):1429-1436. [15] YOON Y,PARK C,KIM J,et al. Characterization of lithium borophosphate glass thin film electrolytes deposited by RF-magnetron sputtering for micro-batteries[J]. Solid State Ionics,2012,225:636-640. [16] SEO I,MARTIN S W. Fast lithium ion conducting solid state thin-film electrolytes based on lithium thio-germanate materials[J]. Acta Materialia,2011,59(4):1839-1846. [17] Money B K,Hariharan K. Glass formation and electrical conductivity studies of melt quenched and mechanically milled 50Li2O∶(50−x)P2O5∶xB2O3[J]. Solid State Ionics,2008,179(27):1273-1277. [18] BATES J,GRUZALSKI G,DUDNEY N,et al. Rechargeable thin-film lithium microbatteries[J]. Solid State Technology,1993,36(7):59-64. [19] BATES J,DUDNEY N,GRUZALSKI G,et al. Electrical properties of amorphous lithium electrolyte thin films[J]. Solid State Ionics,1992,53:647-654. [20] PUT B,VEREECKEN P M,MEERSSCHAUT J,et al. Electrical characterization of ultrathin RF-sputtered LiPON layers for nanoscale batteries[J]. ACS Applied Materials & Interfaces,2016,8(11):7060-7069. [21] SUZUKI N,SHIRAI S,TAKAHASHI N,et al. A lithium phosphorous oxynitride (LiPON) film sputtered from unsintered Li3PO4 powder target[J]. Solid State Ionics,2011,191(1):49-54. [22] ZHAO S L,WEN J B,ZHU Y M,et al. Fabrication and electro- chemical properties of all solid state 0.3Ag-V2O5|LiPON|Li thin film battery[J]. Journal of Functional Materials,2008,39(1):91-94. [23] NOWAK S,BERKEMEIER F,SCHMITZ G. Ultra-thin LiPON filmsifundamental properties and application in solid state thin film model batteries[J]. Journal of Power Sources,2015,275:144-150. [24] KIM H T,MUN T,PARK C,et al. Characteristics of lithium phosphorous oxynitride thin films deposited by metal-organic chemical vapor deposition technique[J]. Journal of Power Sources,2013,244:641-645. [25] NISULA M,SHINDO Y,KOGA H,et al. Atomic layer deposition of lithium phosphorus oxynitride[J]. Chemistry of Materials,2015,27(20):6987-6993. [26] YOON Y,PARK C,KIM J,et al. The mixed former effect in lithium borophosphate oxynitride thin film electrolytes for all-solid-state micro-batteries[J]. Electrochimica Acta,2013,111:144-151. [27] LI C L,ZHANG B,FU Z W. Physical and electrochemical characterization of amorphous lithium lanthanum titanate solid electrolyte thin-film fabricated by e-beam evaporation[J]. Thin Solid Films,2006,515(4):1886-1892. [28] JEE S H,LEE M J,AHN H S,et al. Characteristics of a new type of solid-state electrolyte with a LiPON interlayer for Li-ion thin film batteries[J]. Solid State Ionics,2010,181(19):902-906. [29] LEE J M, KIM S H,TAK Y,et al. Study on the LLT solid electrolyte thin film with LiPON interlayer intervening between LLT and electrodes[J]. Journal of Power Sources,2006,163(1):173-179. [30] SU Y,FALGENHAUER J,POLITY A,et al. LiPON thin films with high nitrogen content for application in lithium batteries and electrochromic devices prepared by RF magnetron sputtering[J]. Solid State Ionics,2015,282:63-69. [31] HAMON Y,DOUARD A,SABARY F,et al. Influence of sputtering conditions on ionic conductivity of LiPON thin films[J]. Solid State Ionics,2006,177(3):257-261. [32] FLEUTOT B,PECQUENARD B,MARTINEZ H,et al. Investigation of the local structure of LiPON thin films to better understand the role of nitrogen on their performance[J]. Solid State Ionics,2011,186(1):29-36. [33] KOO M,PARK K I,LEE S H,et al. Bendable inorganic thin-film battery for fully flexible electronic systems[J]. Nano Letters,2012,12(9):4810-4816. [34] KOZEN A C,PEARSE A J,LIN C F,et al. Atomic layer deposition of the solid electrolyte LiPON[J]. Chemistry of Materials,2015,27(15):5324-5331. [35] WEI J,OGAWA D,FUKUMURA T,et al. Epitaxial strain-controlled ionic conductivity in Li-ion solid electrolyte Li0.33La0.56TiO3 thin films[J]. Crystal Growth & Design,2015,15(5):2187-2191. [36] XIONG Y,TAO H,ZHAO J,et al. Effects of annealing temperature on structure and opt-electric properties of ion-conducting LLTO thin films prepared by RF magnetron sputtering[J]. Journal of Alloys and Compounds,2011,509(5):1910-1914. [37] LIU J,BANIS MN,LI X,et al. Atomic layer deposition of lithium tantalate solid-state electrolytes[J]. The Journal of Physical Chemistry C,2013,117(39):20260-20267. [38] LÜ X,WU G,HOWARD J W,et al. Li-rich anti-perovskite Li3OCl films with enhanced ionic conductivity[J]. Chemical Communications, 2014,50(78):11520-11522. [39] LÜ X,HOWARD JW,CHEN A,et al. Antiperovskite Li3OCl superionic conductor films for solid-state Li-ion batteries[J]. Advanced Science,2016,3(3):doi:10.1002/advs.201500359. [40] XIE J,IMANISHI N,ZHANG T,et al. Amorphous LiCoO2 thin films on Li1+x+yAlxTi2−xSiyP3−yO12 prepared by radio frequency magnetron sputtering for all-solid-state Li-ion batteries[J]. Electrochimica Acta,2010,55(19):5440-5445. [41] CHEN H,TAO H,ZHAO X,et al. Fabrication and ionic conductivity of amorphous Li-Al-Ti-P-O thin film[J]. Journal of Non-Crystalline Solids,2011,357(16):3267-3271. [42] REINACHER J,BERENDTS S,JANEK J. Preparation and electrical properties of garnet-type Li6BaLa2Ta2O12 lithium solid electrolyte thin films prepared by pulsed laser deposition[J]. Solid State Ionics,2014,258:1-7. [43] KIM S,HIRAYAMA M,TAMINATO S,et al. Epitaxial growth and lithium ion conductivity of lithium-oxide garnet for an all solid-state battery electrolyte[J]. Dalton Transactions,2013,42(36):13112-13117. [44] KIM S,HIRAYAMA M,SUZUKI K,et al. Hetero-epitaxial growth of Li0.17La0.61TiO3 solid electrolyte on LiMn2O4 electrode for all solid-state batteries[J]. Solid State Ionics,2014,262:578-581. [45] CHEN R,LIANG W,ZHANG H,et al. Preparation and performance of novel LLTO thin film electrolytes for thin film lithium batteries[J]. Chinese Science Bulletin,2012,57(32):4199-4204. [46] KIM S,HIRAYAMA M,CHO W,et al. Low temperature synthesis and ionic conductivity of the epitaxial Li0.17La0.61TiO3 film electrolyte[J]. CrystEngComm,2014,16(6):1044-1049. [47] MOUTA R,DINIZ E,PASCHOAL C. Li+ interstitials as the charge carriers in superionic lithium-rich anti-perovskites[J]. Journal of Materials Chemistry A,2016,4(5):1586-1590. [48] ZHAO Y,DAEMEN L L. Superionic conductivity in lithium-rich anti-perovskites[J]. Journal of the American Chemical Society,2012,134(36):15042-15047. [49] BRAGA M H,MURCHISON A J,FERREIRA J A,et al. Glass-amorphous alkali-ion solid electrolytes and their performance in symmetrical cells[J]. Energy & Environmental Science,2016,9(3):948-954. [50] MOUTA R,MELO M A,DINIZ E M,et al. Concentration of charge carriers, migration, and stability in Li3OCl solid electrolytes[J]. Chemistry of Materials,2014,26(24):7137-7144. [51] WU F,LIU Y,CHEN R,et al. Preparation and performance of novel Li-Ti-Si-P-O-N thin film electrolyte for thin-film lithium batteries[J]. Journal of Power Sources,2009,189(1):467-470. [52] TAN G,WU F,LI L,et al. Magnetron sputtering preparation of nitrogen-incorporated lithium-aluminum-titanium phosphate based thin film electrolytes for all-solid-state lithium ion batteries[J]. The Journal of Physical Chemistry C,2012,116(5):3817-3826. [53] LING Q,YU Z,XU H,et al. Preparation and electrical properties of amorphous Li-Al-Ti-P-O thin film electrolyte[J]. Materials Letters,2016,169:42-45. [54] NONG J,XU H,YU Z,et al. Properties and preparation of Li-La-Zr-O thin film electrolyte[J]. Material Letters,2015,154:167-169. [55] KALITA D,LEE S,LEE K,et al. Ionic conductivity properties of amorphous Li-La-Zr-O Sold electrolyte for thin film electrolyte[J]. Solid State Ionics,2012,229(14):14-19. [56] KANEHORI K,ITO Y,KIRINO F,et al. Titanium disulfide films fabricated by plasma CVD[J]. Solid State Ionics,1986,18:818-822. [57] WHITTINGHAM M S. Chemistry of intercalation compounds:Metal guests in chalcogenide hosts[J]. Progress in Solid State Chemistry,1978,12(1):41-99. [58] STEVEN D J,JAMES R A. Development and performance of a rechargeable thin film solid state microbattery[J]. Journal of Power Sources,1995,54(1):63-67. [59] PELÉ V,FLAMARY F,BOURGEOIS L,et al. Perfect reversibility of the lithium insertion in FeS2:The combined effects of all-solid-state and thin film cell configurations[J]. Electrochemistry Communications,2015,51:81-84. [60] JEON E J,SHIN Y W,NAM S C,et al. Characterization of all-solid-state thin-film batteries with V2O5 thin-film cathodes using ex situ and in situ processes[J]. Journal of the Electrochemical Society,2001,148(4):A318-A322. [61] LEE S H,LIU P,TRACY C E,et al. All-solid-state rocking chair lithium battery on a flexible al substrate[J]. Electrochemical and Solid-State Letters,1999,2(9):425-427. [62] NOTTEN P H,ROOZEBOOM F,NIESSEN R A,et al. 3-D integrated all-solid-state rechargeable batteries[J]. Advanced Materials,2007,19(24):4564-4567. [63] CHEN X,POMERANTSEVA E,BANERJEE P,et al. Ozone-based atomic layer deposition of crystalline V2O5 films for high performance electrochemical energy storage[J]. Chemistry of Materials,2012,24(7):1255-1261. [64] MANTOUX A,GROULT H,BALNOIS E,et al. Vanadium oxide films synthesized by CVD and used as positive electrodes in secondary lithium batteries[J]. Journal of the Electrochemical Society,2004,151(3):A368-A373. [65] SAHANA M,SUDAKAR C,THAPA C,et al. Electrochemical properties of V2O5 thin films deposited by spin coating[J]. Materials Science and Engineering B,2007,143(1):42-50. [66] PARK Y J,RYU K S,KIM K M,et al. Electrochemical properties of vanadium oxide thin film deposited by RF sputtering[J]. Solid State Ionics,2002,154:229-235. [67] OHTSUKA H,OKADA S,YAMAKI J. Solid state battery with Li2O-V2O5-SiO2 solid electrolyte thin film[J]. Solid State Ionics,1990,40:964-966. [68] JEON S W,LIM J K,LIM S H,et al. As-deposited LiCoO2 thin film cathodes prepared by RF magnetron sputtering[J]. Electrochimica Acta,2005,51(2):268-273. [69] CHIU K F. Lithium cobalt oxide thin films deposited at low temperature by ionized magnetron sputtering[J]. Thin Solid Films,2007,515(11):4614-4618. [70] HUANG R,HITOSUGI T,FISHER C A,et al. Phase transitions in LiCoO2 thin films prepared by pulsed laser deposition[J]. Materials Chemistry and Physics,2012,133(2):1101-1107. [71] OUDENHOVEN J,VAN DONGEN T,NIESSEN R,et al. Low-pressure chemical vapor deposition of LiCoO2 thin films:A systematic investigation of the deposition parameters[J]. Journal of the Electrochemical Society,2009,156(5):D169-D174. [72] DONDERS M,ARNOLDBIK W,KNOOPS H,et al. Atomic layer deposition of LiCoO2 thin-film electrodes for all-solid-state Li-ion micro-batteries[J]. Journal of the Electrochemical Society,2013,160(5):A3066-A3071. [73] FRAGNAUD P,BROUSSE T,SCHLEICH D. Characterization of sprayed and sputter deposited LiCoO2 thin films for rechargeable microbatteries[J]. Journal of Power Sources,1996,63(2):187-191. [74] PATIL V,PATIL A,CHOI J W,et al. Synthesis and characterization of LiCoO2 thin films prepared by the sol-gel method[J]. Solid State Sciences,2011,13(6):1232-1234. [75] LIAO C L,FUNG K Z. Lithium cobalt oxide cathode film prepared by RF sputtering[J]. Journal of Power Sources,2004,128(2):263-269. [76] YOON Y,LEE S,CHO S,et al. Influence of two-step heat treatment on sputtered lithium cobalt oxide thin films[J]. Journal of the Electrochemical Society,2011,158(12):A1313-A1319. [77] SONG S W,CHOI H,PARK H Y,et al. High rate-induced structural changes in thin-film lithium batteries on flexible substrate[J]. Journal of Power Sources,2010,195(24):8275-8279. [78] YOON Y,PARK C,KIM J,et al. Lattice orientation control of lithium cobalt oxide cathode film for all-solid-state thin film batteries[J]. Journal of Power Sources,2013,226:186-190. [79] WANG B,BATES J,HART F,et al. Characterization of thin-film rechargeable lithium batteries with lithium cobalt oxide cathodes[J]. Journal of the Electrochemical Society,1996,143(10):3203-3213. [80] DUDNEY NJ,JANG Y I. Analysis of thin-film lithium batteries with cathodes of 50 nm to 4 μm thick LiCoO2 [J]. Journal of Power Sources,2003,119:300-304. [81] WOOK J S,LEE S M. LiCoO2/Ag multilayer film cathodes for thin-film rechargeable lithium batteries[J]. Journal of the Electrochemical Society,2007,154(1):A22-A25. [82] TAN G,WU F,LU J,et al. Controllable crystalline preferred orientation in Li-Co-Ni-Mn oxide cathode thin films for all-solid-state lithium batteries[J]. Nanoscale,2014,6(18):10611-10622. [83] RAMANA C,ZAGHIB K,JULIEN C. Synthesis, structural and electrochemical properties of pulsed laser deposited Li(Ni, Co)O2 films[J]. Journal of Power Sources,2006,159(2):1310-1315. [84] WOHLFAHRT-MEHRENS M,VOGLER C,GARCHE J. Aging mechanisms of lithium cathode materials[J]. Journal of Power Sources,2004,127(1):58-64. [85] XIE J,KOHNO K,MATSUMURA T,et al. Li-ion diffusion kinetics in LiMn2O4 thin films prepared by pulsed laser deposition[J]. Electrochimica Acta,2008,54(2):376-381. [86] HWANG B J,WANG C Y,CHENG M Y,et al. Structure, morphology, and electrochemical investigation of LiMn2O4 thin film cathodes deposited by radio frequency sputtering for lithium microbatteries[J]. The Journal of Physical Chemistry C,2009,113(26):11373-11380. [87] PARK Y,KIM J,KIM M,et al. Preparation of LiMn2O4 thin films by a sol-gel method[J]. Solid State Ionics,2000,130(3):203-214. [88] CHUNG K Y,KIM K B. Investigations into capacity fading as a result of a Jahn-Teller distortion in 4V LiMn2O4 thin film electrodes[J]. Electrochimica Acta,2004,49(20):3327-3337. [89] LIU P,ZHANG J G,TURNER J A,et al. Lithium-manganese-oxide thin-film cathodes prepared by plasma-enhanced chemical vapor deposition[J]. Journal of the Electrochemical Society,1999,146(6):2001-2005. [90] DUDNEY N,BATES J,ZUHR R,et al. Nanocrystalline LixMn2−yO4cathodes for solid-state thin-film rechargeable lithium batteries[J]. Journal of the Electrochemical Society,1999,146(7):2455-2464. [91] MOON H S,LEE W,REUCROFT P J,et al. Effect of film stress on electrochemical properties of lithium manganese oxide thin films[J]. Journal of Power Sources,2003,119:710-712. [92] LEE K L,JUNG J Y,LEE S W,et al. Electrochemical characteristics and cycle performance of LiMn2O4/a-Si microbattery[J]. Journal of Power Sources,2004,130(1):241-246. [93] OTSUJI H,KAWAHARA K,IKEGAMI T,et al. LiMn2O4 thin films prepared by pulsed laser deposition for rechargeable batteries[J]. Thin Solid Films,2006,506:120-122. [94] ROEDER M,BELEKE A B,GUNTOW U,et al. Li4Ti5O12 and LiMn2O4 thin-film electrodes on transparent conducting oxides for all-solid-state and electrochromic applications[J]. Journal of Power Sources,2016,301:35-40. [95] CHIU K F,CHEN C L. Electrochemical performance of magnetron sputter deposited LiFePO4-Ag composite thin film cathodes[J]. Surface and Coatings Technology,2010,205(5):1642-1646. [96] CHIU K F,CHEN P. Structural evolution and electrochemical performance of LiFePO4/C thin films deposited by ionized magnetron sputtering[J]. Surface and Coatings Technology,2008,203(5):872-875. [97] KIM I,PARK J,NAM T H,et al. Electrochemical properties of an as-deposited LiFePO4 thin film electrode prepared by aerosol deposition[J]. Journal of Power Sources,2013,244:646-651. [98] SUN J,TANG K,YU X,et al. Needle-like LiFePO4 thin films prepared by an off-axis pulsed laser deposition technique[J]. Thin Solid Films,2009,517(8):2618-2622. [99] MA J,QIN Q Z. Electrochemical performance of nanocrystalline LiMPO4 thin-films prepared by electrostatic spray deposition[J]. Journal of Power Sources,2005,148:66-71. [100] WEST W,WHITACRE J,RATNAKUMAR B. Radio frequency magnetron-sputtered LiCoPO4 cathodes for 4.8 V thin-film batteries[J]. Journal of the Electrochemical Society,2003,150(12):A1660-A1666. [101] FUJIMOTO D,KUWATA N,MATSUDA Y,et al. Fabrication of solid-state thin-film batteries using LiMnPO4 thin films deposited by pulsed laser deposition[J]. Thin Solid Films,2015,579:81-88. [102] WANG Y,YANG G,YANG Z,et al. High power and capacity of LiNi0.5Mn1.5O4 thin films cathodes prepared by pulsed laser deposition[J]. Electrochimica Acta,2013,102:416-422. [103] LAFONT U,ANASTASOPOL A,GARCIA-TAMAYO E,et al. Electrostatic spray pyrolysis of LiNi0.5Mn1.5O4 films for 3D Li-ion microbatteries[J]. Thin Solid Films,2012,520(9):3464-3471. [104] HOSHINA K,YOSHIMA K,KOTOBUKI M,et al. Fabrication of LiNi0.5Mn1.5O4 thin film cathode by PVP sol-gel process and its application of all-solid-state lithium ion batteries using Li1+ xAlxTi2−x(PO4)3 solid electrolyte[J]. Solid State Ionics,2012,209:30-35. [105] KUWATA N,KUDO S,MATSUDA Y,et al. Fabrication of thin-film lithium batteries with 5-V-class LiCoMnO4 cathodes[J]. Solid State Ionics,2014,262:165-169. [106] YIM H,KONG W Y,KIM Y C,et al. Electrochemical properties of Li[Li0.2Mn0.54Co0.13Ni0.13]O2 cathode thin film by RF sputtering for all-solid-state lithium battery[J]. Journal of Solid State Chemistry,2012,196:288-292. [107] PORTHAULT H,DECAUX C. Electrodeposition of lithium metal thin films and its application in all-solid-state microbatteries[J]. Electrochimica Acta,2016,194:330-337. [108] HAMON Y,BROUSSE T,JOUSSE F,et al. Aluminum negative electrode in lithium ion batteries[J]. Journal of Power Sources,2001,97:185-187. [109] TAILLADES G,SARRADIN J. Silver:High performance anode for thin film lithium ion batteries[J]. Journal of Power Sources,2004,125(2):199-205. [110] LEITE M S,RUZMETOV D,LI Z,et al. Insights into capacity loss mechanisms of all-solid-state Li-ion batteries with Al anodes[J]. Journal of Materials Chemistry A,2014,2(48):20552-20559. [111] KIM Y L,LEE H Y,JANG S W,et al. Electrochemical characteristics of Co-Si alloy and multilayer films as anodes for lithium ion microbatteries[J]. Electrochimica Acta,2003,48(18):2593-2597. [112] SONG S W,STRIEBEL K A,READE R P,et al. Electrochemical studies of nanoncrystalline Mg2Si thin film electrodes prepared by pulsed laser deposition[J]. Journal of the Electrochemical Society,2003,150(1):A121-A127. [113] POLAT B,ERYILMAZ O,KELEŞ O,et al. Compositionally graded SiCu thin film anode by magnetron sputtering for lithium ion battery[J]. Thin Solid Films,2015,596:190-197. [114] HANG B T,OHNISHI T,OSADA M,et al. Lithium silicon sulfide as an anode material in all-solid-state lithium batteries[J]. Journal of Power Sources,2010,195(10):3323-3327. [115] LEE K,LEE Y,YOON Y. Effect of carbon content on nanocomposite Si1-xCxthin film anode for all-solid-state battery[J]. Electrochimica Acta,2014,147:232-240. [116] PARK S,LEE K S,YOON Y S. Designing SnOx/C films via co-sputtering as anodes for all-solid-state batteries[J]. Surface and Coatings Technology,2016,294:139-144. [117] KUWATA N,KAWAMURA J,TORIBAMI K,et al. Thin-film lithium-ion battery with amorphous solid electrolyte fabricated by pulsed laser deposition[J]. Electrochemistry Communications,2004,6(4):417-421. [118] WUNDE F,BERKEMEIER F,SCHMITZ G. Lithium diffusion in sputter-deposited Li4Ti5O12 thin films[J]. Journal of Power Sources,2012,215:109-115. [119] DENG J,LU Z,BELHAROUAK I,et al. Preparation and electrochemical properties of Li4Ti5O12 thin film electrodes by pulsed laser deposition[J]. Journal of Power Sources,2009,193(2):816-821. [120] ZHU J,ZENG K,LU L. Cycling effects on interfacial reliability of TiO2 anode film in thin film lithium-ion microbatteries[J]. Journal of Solid State Electrochemistry,2012,16(5):1877-1881. [121] YAMAMOTO S,SUMITA T,MIYASHITA A,et al. Preparation of epitaxial TiO2 films by pulsed laser deposition technique[J]. Thin Solid Films,2001,401(1):88-93. [122] GUO D,ITO A,GOTO T,et al. Preparation of rutile TiO2 thin films by laser chemical vapor deposition method[J]. Journal of Advanced Ceramics,2013,2(2):162-166. [123] REINERS M,XU K,ASLAM N,et al. Growth and crystallization of TiO2 thin films by atomic layer deposition using a novel amido guanidinate titanium source and tetrakis-dimethylamido-titanium[J]. Chemistry of Materials,2013,25(15):2934-2943. [124] ALAM M,CAMERON D. Preparation and characterization of TiO2 thin films by sol-gel method[J]. Journal of Sol-Gel Science and Technology,2002,25(2):137-145. [125] DONDERS M,KNOOPS H,KESSELS W,et al. Co3O4 as anode material for thin film micro-batteries prepared by remote plasma atomic layer deposition[J]. Journal of Power Sources,2012,203:72-77. [126] SANTHANAGOPALAN D,QIAN D,MCGILVRAY T,et al. Interface limited lithium transport in solid-state batteries[J]. The Journal of Physical Chemistry Letters,2013,5(2):298-303. [127] JEONG E,HONG C,TAK Y,et al. Investigation of interfacial resistance between LiCoO2 cathode and LiPON electrolyte in the thin film battery[J]. Journal of Power Sources,2006,159(1):223-226. [128] LARFAILLOU S,GUY-BOUYSSOU D,LE CRAS F,et al. Comprehensive characterization of all-solid-state thin films commercial microbatteries by electrochemical impedance spectroscopy[J]. Journal of Power Sources,2016,319:139-146. [129] BRAZIER A,DUPONT L,DANTRAS-LAFFONT L,et al. First cross-section observation of an all solid-state lithium-ion “nanobattery” by transmission electron microscopy[J]. Chemistry of Materials,2008,20(6):2352-2359. [130] YAMAMOTO K,IRIYAMA Y,ASAKA T,et al. Dynamic visualization of the electric potential in an all-solid-state rechargeable lithium battery[J]. Angewandte Chemie International Edition,2010,49(26):4414-4417. [131] WANG Z,SANTHANAGOPALAN D,ZHANG W,et al. In situ STEM/EELS observation of nanoscale interfacial phenomena in all-solid-state batteries[J]. Nano Letters,2016. 16(6):3760-3767. [132] SCHWÖSCHWA,HAUSBRAND R,JAEGERMANN W. Interface reactions between LiPON and lithium studied by in-situ X-ray photoemission[J]. Solid State Ionics,2015,273:51-54. [133] CHIU K F,CHEN C L,CHEN B S,et al. Modification of electrolyte/cathode interfaces by solid-state electrolyte thin films[J]. ECS Transactions,2011,35(32):67-75. [134] LEE Y N,YOON Y S. Cycle stability increase by insertion of Li-La-Ta-O thin-film electrrolyte between cathode and solid electrolyte for all-solid-state battery[J]. Thin Solid Films,2015,579:75-80. [135] YADA C,OHMORI A,IDE K,et al. Dielectric modification of 5V-class cathodes for high-voltage all-solid-state lithium batteries[J]. Advanced Energy Materials,2014,4(9):1079-1098. [136] OKITA K,IKEDA K I,SANO H,et al. Stabilizing lithium plating-stripping reaction between a lithium phosphorus oxynitride glass electrolyte and copper thin film by platinum insertion[J]. Journal of Power Sources,2011,196(4):2135-2142. [137] BAGGETTO L,NIESSEN RA,ROOZEBOOM F,et al. High energy density all-solid-state batteries:A challenging concept towards 3D integration[J]. Advanced Functional Materials,2008,18(7):1057-1066. [138] NAKAZAWA H,SANO K,ABE T,et al. Charge-discharge characteristics of all-solid-state thin-filmed lithium-ion batteries using amorphous Nb2O5 negative electrodes[J]. Journal of Power Sources,2007,174(2):838-842. [139] http://www.cymbet.com/products/index.php [140] NAVONE C,PEREIRA-RAMOS J P,BADDOUR-HADJEAN R,et al. Lithiated c-V2O5 thin-film as positive electrode for rocking-chair solid-state lithium microbattery[J]. Ionics,2010,16(7):577-580. [141] KUWATA N,KUMAR R,TORIBAMI K,et al. Thin film lithium ion batteries prepared only by pulsed laser deposition[J]. Solid State Ionics,2006,177(26):2827-2832. [142] RUZMETOV D,OLESHKO V P,HANEY P M,et al. Electrolyte stability determines scaling limits for solid-state 3D Li ion batteries[J]. Nano Letters,2011,12(1):505-511. [143] IRIYAMA Y,YADA C,ABE T,et al. A new kind of all-solid-state thin-film-type lithium-ion battery developed by applying a DC high voltage[J]. Electrochemistry Communications,2006,8(8):1287-1291. [144] LIU W Y,FU Z W,QIN Q Z. A sequential thin-film deposition equipment for in-situ fabricating all-solid-state thin film lithium batteries[J]. Thin Solid Films,2007,515(7):4045-4048. [145] CARMO J,ROCHA R,SILVA A,et al. A thin-film rechargeable battery for integration in stand-alone microsystems[J]. Procedia Chemistry,2009,1(1):453-456. [146] LI C L,FU Z W. All-solid-state rechargeable thin film lithium batteries with LixMn2O4 and LixMn2O4-0.5ZrO2 cathodes[J]. Electrochimica Acta,2007,52(20):6155-6164. [147] LETHIEN C,ZEGAOUI M,ROUSSEL P,et al. Micro-patterning of LiPON and lithium iron phosphate material deposited onto silicon nanopillars array for lithium ion solid state 3D micro-battery[J]. Microelectronic Engineering,2011,88(10):3172-3177. [148] LASTOSKIE CM,DAI Q. Comparative life cycle assessment of laminated and vacuum vapor-deposited thin film solid-state batteries[J]. Journal of Cleaner Production,2015,91:158-169. [149] HARUTA M,SHIRAKI S,OHSAWA T,et al. Preparation and in-situ characterization of well-defined solid electrolyte/electrode interfaces in thin-film lithium batteries[J]. Solid State Ionics,2016,285:118-121. [150] TREVEY J E,WANG J,DELUCA C M,et al. Nanostructured silicon electrodes for solid-state 3-d rechargeable lithium batteries[J]. Sensors and Actuators A:Physical,2011,167(2):139-145. [151] RIBEIRO J,SOUSA R,SOUSA J,et al. Rechargeable lithium film batteries-encapsulation and protection[J]. Procedia Engineering,2012,47:676-679. |
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